Semiconductor market: Metal bellows and expansion joints are Utilized in the semiconductor field to compensate for motion and vibration in vacuum chambers along with other tools.The facet result from the lag compensator would be the unfavorable section that is certainly additional into the technique between The 2 corner frequencies. Dependant upon

Piezoelectric TVA systems may also be used in a hybrid manner. Whilst getting tuned to 1 resonance frequency, they can be actively driven at higher frequencies and perform as inertial mass actuators [25].By implementing an electrical shunt circuit to the piezoelectric ingredient, the stiffness is often diverse without utilizing a sensor component [